Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

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Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2009

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.3148774